Supporting multiple versions (PLC/PC) and various mainstream communication protocols;

Design and production performed in accordance with SEMI safety production standard;

High channel design capacity, UPH400~550pcs;

Suitable for multiple product dimensions and magazines;

MFC wafer level patented design, preventing gas leakage from causing safety accidents  (supporting high-risk gases such as hydrogen);

Patented design of high sealing chamber, up to 5pa;

Water contact angle<10° (related to the material of product surface);

Design of four channels for simultaneous processing of 4 products, with dual bottom electrodes,  reducing the time for board entry and exit, significantly improving efficiency, and ensuring product uniformity in processing.